FAQ
- For details please click on any of the questions below.
- What materials can you grow on Atomate systems?
- What types of systems does Atomate offer?
- What is the difference between Atomate's research and production systems?
- Can I run silicon processes on my CNT system?
- What is a LeakProof Seal and how is it better than any other quartz-to-metal seal?
- What types of CNTs can I grow in my system?
- Does Atomate make systems other than quartz tube furnace systems?
- Who are typical Atomate customers?
- What are integrated CVD solutions?
What materials can you grow on Atomate systems?
Atomate systems can be used to grow a variety of materials including carbon nanotubes (CNT), a variety of metal oxide (including ZnO, SnO, and VO) and semiconducting nanowires (including Si, SiGe, and GaN), and graphitic nanostructures (including monolayer graphite).
What types of systems does Atomate offer?
We specialize in chemical vapor deposition (CVD) techniques for nanostructure synthesis. These techniques include but are not limited to thermal CVD, low pressure CVD (LPCVD), plasma enhanced CVD (PECVD), metalorganic CVD (MOCVD), and laser CVD (LCVD).
What is the difference between Atomate's research and production systems?
Research systems are designed for high flexibility and are configurable for a variety of processes. For example, you can run a solid source process for ZnO nanowires and then a gas precursor process for CNT in the next run. Researchers often vary the types of substrates they use, including irregularly shaped substrates, so there are a variety of boats and holders available for any Atomate system. We anticipate that research systems will evolve. Systems are designed to evolve with research needs, such as by adding ports, adding modules, and changing tube length.
Production systems are optimized to process full wafers for a specific type of well characterized process, i.e., solid source, gas, or liquid process, leading to specific outputs. Atomate's systems achieve uniform heating, distributed precursor delivery across the substrate surface, and controlled, repeatable pressure levels for which control can be automated. Production systems are expected to evolve as research uncovers new processing needs. Production systems include automated handling and simplified interfaces. Configurations can be changed to serve specific processing needs for processes that are already defined while providing SEMI-compliant tools with simplified interfaces and automation capability for handling; low maintenance and low cost of ownership; and high volume capability.
Can I run silicon processes on my CNT system?
Silicon processes typically use hydride gases, which require use of different seal materials and safety gas handling systems that are not necessary for carbon nanotube synthesis. A system used for silicon nanowire research should always be used in an exhausted enclosure. For this purpose, one can set up a benchtop system in a fume hood, or use one of Atomate's fully enclosed systems. Without proper gas handling capability, CNT systems used for Si processes may result in clogged mass flow controllers (MFCs).
What is a LeakProof Seal and how is it better than any other quartz-to-metal seal?
The LeakProof Seal was designed after many discussions with researchers using quartz tube systems for CVD synthesis. When mating their process tubes to the rest of the system, fittings would often be insufficiently tightened or incorrectly assembled, resulting in undetected leaks. The LeakProof Seal's advantage is that it is a differentially pumped seal with a gauge that shows the condition of the seal. When the seal is correctly assembled it will not leak, but in the instance that the seal is not properly assembled, the user will see that indication and can adjust the seal before proceeding.
What types of CNTs can I grow in my system?
Our CVD systems can be used to grow single-walled carbon nanotubes (SWNT/ SWCNT) and a range of double- and multi-walled carbon nanotubes (DWNT/ DWCNT or MWNT/ MWCNT).
Does Atomate make systems other than quartz tube furnace systems?
The bulk of the body of research has been performed with quartz tube systems. Our main product line follows this trend so that users can take advantage of the enormous body of work that has been performed with this type of system. We also make different chamber styles using different furnace materials, including stainless steel cold-wall reactors, vertical quartz reactors, and alumina chamber reactors, so whatever your plans, don't hesitate to contact Atomate to discuss your system requirements.
Who are typical Atomate customers?
Atomate's products have been sold around the world to researchers, and engineers for use in universities, corporate and federal research laboratories, and production facilities on six continents. The list of customers grows daily. Atomate modules have been purchased by customers with diverse applications in fields including physics, chemistry, biology, and forestry. Though focused on solving problems in the CVD field, Atomate products often lead to significant improvements in many other processing techniques. For references, please contact us.
What are integrated CVD solutions?
In addition to providing CVD systems, we have parlayed our knowledge of systems, materials and our understanding of handling issues into a line of facility support equipment. This support includes provision of gas cabinets, other gas delivery systems, gas sensor arrays, chillers, and effluent abatement for hazardous materials, such as hydride gases and ammonia.
