Control Modules for Systems and Processes

Atomate offers a number of modules to control and monitor various process variables and manage all aspects of your system's performance. The controllers can be purchased as stand-alone units or included as part of your complete research or production CVD system.

• Pneumatic Valve Control Module
  Actuate pneumatic on/ off valves for both normally open and normally closed valves.
• Temperature Zone Control Module
  Controls up to three heating or cooling zones with Solid State Relay (SSR) control (optional silicon controlled rectifier/ thyristor model available)
• Gas Flow Control Module
  Integrates control interface for Mass Flow Controllers (MFCs) and pneumatic shutoff valves
• Operational Status and Interlock Module

Monitors interlocks and sensors, and governs the operational status of the system for applications that require automated safety response.

Atomate engineers are also available to implement customized control solutions for existing/ other OEM retrofits or refurbishments. 

Ordering Information for Standard Configurations
Description	Product Code	Ordering Notes
Pneumatic valve control module, 4 valve configuration	PVCM-4
Pneumatic valve control module, 8 valve configuration	PVCM-8
Temperature zone control module, 3 zones	TZCM-3x-224	x = P for standard pulse output for standard furnaces x = A for the phase angle version for rapid thermal systems
Gas flow control module for up to 8 gas channels	GFCM-M8Vxx	xx = 08, 16, or 24 for the number of valves desired
Operational status and interlock module	OSIM	xx = 08, 16, or 24 for the number of valves desired