Controllers

Pneumatic Valve Control Module

Pneumatic solenoid valves add new control capability to existing hardware to improve process control and repeatability. Available in standard four valve (PVCM-4) or eight valve (PVCM-8) configurations, each control module can be controlled manually (via touch pad) or with Atomate Workbench software.

  • Atomate's pneumatic valve control module can be configured with your system for a number of applications.
  • Upgrading an existing gas delivery module (GDM) with gas shutoff valves for each gas channel
  • Controlling chamber roughing capability for low pressure chemical vapor deposition (LPCVD)
  • Automating valves and cross-over panels to permit multiple input gases per mass flow controller (MFC)
  • Adding purge functions to gas lines
  • Providing shutdown capability when used with a safety or interlock system
  • Controlling any other pneumatic actuators, such as furnace open and close actuators, positioners, loaders, or grippers
Ordering Information
Description Product Code
Pneumatic valve control module, 4 valve configuration PVCM-4
Pneumatic valve control module, 8 valve configuration PVCM-8

Temperature Zone Control Module

Accurate temperature control is critical for CVD processing and many other applications. In systems with multiple control zones, Atomate's control modules provide multi-zone control capability in a space saving unit.

  • The temperature zone control module offers the following features.
  • Up to three temperature control zones for heating and cooling applications, such as furnaces or chiller stations
  • Three front-mounted breakers for independent zone isolation
  • Manual (via front panel) and automatic (via computer) recipe-driven control modes
  • Safety interlock port for user-defined input
  • Configurable for 110 VAC or 240 VAC power supply
  • Fully integrated with Atomate Workbench recipe control software
  • Pulse (standard) and phase angle (optional) output models available
Ordering Information
Description Product Code Ordering Notes
Temperature zone
control module, 3 zones		 TZCM-3x-224 x = P for standard pulse output for standard furnaces
x = A for the phase angle version for rapid thermal systems

Operational Status and Interlock Module

Atomate's operational status and interlock module provides a system of interlocks and controls that automatically moves your system into safe states when triggered.  The system features a programmable logic controller (PLC)-based core that monitors a range of standard digital and analog sensor inputs.

  • Gas sensors
  • Panel/door open/closed sensors
  • Cooling water flow
  • Water leak
  • Exhaust air flow
  • Power loss
  • User-defined external remote sensors (i.e. facility gas sensor array or life safety system)
  • Process pressure loss (when appropriate)

When a sensor sends a triggering signal, the PLC commands relays that reconfigures the equipment into system safe states. Fault trees and logic tables are customized for your application.

In addition to the standard inputs, this control module can monitor optional remote inputs. The standard program includes an interface to an eight-level light-stick status display and audible alarm. The interlock status panel is programmable and provides information to assist a user in identifying the required corrective actions to return to operational status.

Ordering Information
Description Product Code
Operational Status and Interlock Module OSIM
Contact Atomate for more information about control modules.
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