Gas Flow Control Module

Atomate's multi-channel gas flow control module provides flow control for up to 8 gas channels. It controls Mass Flow Controllers (MFCs) and allows storage of gas correction factors. Control of up to 24 pneumatic solenoid valves enables control of pneumatic process isolation valves for gas shutoff and a variety of other applications.

• Adding chamber roughing pressure pump-down to Atomate Workbench software recipe control for Low Pressure Chemical Vapor Deposition (LPCVD)
• Automating valve/ cross-over panels to permit multiple input gases per MFC gas channel
• Adding automatic purging of individual lines
• Providing automatic shutdown capability from the safety system, emergency system, or emergency manual off button
• Controlling any other pneumatic actuators, such as furnace open and close actuators, positioners, loaders, or grippers
• Changing gas flow paths for purge or evacuation

• The gas flow control module integrates the capabilities of Atomate stand-alone controllers, as well as adding numerous options for individualized system control
• Touch screen interface allows manual control mode
• RS-232 serial interface provides a PC recipe-driven control mode for process precision, repeatability, and data storage
• Pneumatic control valves can be plumbed to provide a variety of applications, as provided by Atomate's pneumatic valve control module.
• Compatible with most MFC brands

Ordering Information
Description	Product Code	Ordering Notes
Gas flow control module for up to 8 gas channels	GFCM-M8Vxx	xx = 08, 16, or 24 for the number of valves desired