Radio Frequency Heating

Radio frequency (RF) heating can be used for many applications. An inductive load, typically graphite, can be inserted into the process chamber and heated with a coiled RF antenna surrounding the inductive load. Temperatures exceeding 2000ºC can be achieved. Temperature is often measured with an optical pyrometer mounted outside of the process chamber.

Source gases entering a standard reaction chamber can be pre-energized using an RF energizer to provide additional processing options.

Radio frequency heaters ramp and cool extremely quickly and offer very fast stabilization times. Atomate engineers design the inductive loads to achieve uniform heating across the substrates, and we use only the highest quality materials to ensure minimal contamination from the load.