Stage Heating

Atomate can provide a variety of stage heaters for contacting/ non-contacting applications with options such as single - or multi-zone configurations, stage rotation, and height adjustability. Coatings (pyrolitic graphite, boron nitride, or silicon carbide) are available for the heating elements, which are typically graphite or SiC.

Rotating stage heater for 50 mm substrates in vertical MOCVD reactor

We have developed a number of stage heaters for vertical and horizontal flow systems for LPCVD and MOCVD. A custom stage heater can also be built to your specifications.