Standard Coil Heating

Standard coil heaters are built using resistive heating elements. The most common heating element, NiCr, can reach a maximum temperature of 1100°C to 1200°C, depending on the furnace configuration. For higher temperatures, Atomate can build your CVD system with alternate heater materials, such as SiC or MoSi₂. While these furnaces provide slower heating and cooling than other heating options, they are extremely stable and provide excellent thermal uniformity over a broad heating zone.