Ordering Information for LeakProof Seals and Accessories
| LeakProof Seals – Viton | ||
| Name |
Description |
Product Code |
| LeakProof Seal – 25 mm (~ 1") set; Viton O-ring |
Set contains two (2) leak-free seals for 25 mm process tube. Each seal features SureSeal indicator, Viton O-ring, and PTFE backup ring, and provides QF40 flange | LPS01-SETV |
| LeakProof Seal – 50 mm (~ 2") set; Viton O-ring |
Set contains two (2) leak-free seals for 50 mm process tube. Each seal features SureSeal indicator, Viton O-ring, and PTFE backup ring, and provides QF50 flange | LPS02-SETV |
| LeakProof Seal – 75 mm (~ 3") set; Viton O-ring |
Set contains two (2) leak-free seals for 75 mm process tube. each seal features SureSeal indicator, Viton O-ring, and PTFE backup ring, and provides QF100 flange | LPS03-SETV |
| Atomate also offers 125 mm (~ 5") LeakProof Seals. Contact us for more information. | ||
| LeakProof Seals – Perfluorinated Elastomer (i.e., Kalrez or Perlast) | ||
| Name |
Description |
Product Code |
| LeakProof Seal - 25 mm (~ 1") set; Kalrez O-ring |
Set contains two (2) leak-free seals for 25 mm process tube. Each seal features SureSeal indicator, Kalrez O-ring, and PTFE backup ring, and provides QF40 flange | LPS01-SETK |
| LeakProof Seal - 50 mm (~ 2") set; Kalrez O-ring |
Set contains two (2) leak-free seals for 50 mm process tube. Each seal features SureSeal indicator, Kalrez O-ring, and PTFE backup ring, and provides QF50 flange | LPS02-SETK |
| LeakProof Seal - 75 mm (~ 3") set; Perlast O-ring |
Set contains two (2) leak-free seals for 75 mm process tube. Each seal features SureSeal indicator, Kalrez O-ring, and PTFE backup ring, and provides QF100 flange | LPS03-SETK |
| Atomate also offers 125 mm (~ 5') LeakProof Seals. Contact us for more information. | ||
| Quick Flange Kits | ||
| Name |
Description |
Product Code |
| Quick Flange Kit for 25 mm (~ 1") LeakProof Seals with Viton O-ring |
Kit includes one (1) QF40 adapter to 1/4" Swagelok; one 1) QF40 Centering Ring Assembly with Viton O-ring; and one (1) QF40 aluminum toggle clamp | QF040-KITV |
| Quick Flange Kit for 25 mm (~ 1") LeakProof Seals with Kalrez O-ring |
Kit includes one (1) QF40 adapter to 1/4" Swagelok; one (1) QF40 Centering Ring Assembly with Kalrez O-ring; and one (1) QF40 aluminum toggle clamp | QF040-KITK |
| Quick Flange Kit for 50 mm (~ 2") LeakProof Seals |
Kit includes one (1) QF50 Adapter to 1/4" Swagelok and one (1) QF50 aluminum toggle clamp.NOTE: QF50 Centering Ring Assembly not needed for 50 mm LeakProof Seals. | QF050-KIT |
| Quick Flange Kit for 75 mm (~ 3") LeakProof Seals with Viton O-ring |
Kit includes one (1) QF100 Adapter to ¼" Swagelok; one (1) QF100 Centering Ring Assembly with Viton O-ring; and one (1) QF100 aluminum toggle clamp. | QF100-KITV |
| Quick Flange Kit for 75 mm (~ 3") LeakProof Seals with Perlast O-ring |
Kit includes one (1) QF100 Adapter to ¼" Swagelok; one (1) QF100 Centering Ring Assembly with Kalrez O-ring; and one (1) QF100 aluminum toggle clamp. | QF100-KITK |
| Atomate offers different flange adapters. Contact us for more information. | ||
Industry-standard parts to integrate LeakProof Seals with your system
| LeakProof Seal O-ring Kits | ||
| Name |
Description |
Product Code |
| Replacement Viton O-ring kit for 25 mm (~ 1") LeakProof Seal | Kit includes two (2) Viton O-rings for 25 mm quartz tube, two (2) PTFE backup rings for 25 mm LeakProof Seals, and one (1) Viton O-ring for Centering Ring Assembly | LPS01-ORKV |
| Replacement Kalrez O-ring kit for 25 mm (~ 1") LeakProof Seal | Kit includes two (2) Kalrez O-rings for 25 mm quartz tube, two (2) PTFE backup rings for 25 mm LeakProof Seals, and one (1) Kalrez O-ring for Centering Ring Assembly | LPS01-ORKK |
| Replacement Viton O-ring kit for 50 mm (~ 2") LeakProof Seal | Kit includes two (2) Viton O-rings for 50 mm quartz tube, two (2) PTFE backup rings for 50 mm LeakProof Seals, and one (1) Viton O-ring for QF50 flange | LPS02-ORKV |
| Replacement Kalrez O-ring kit for 50 mm (~ 2") LeakProof Seal | Kit includes two (2) Kalrez O-rings for 50 mm quartz tube, two (2) PTFE backup rings for 50 mm LeakProof Seals, and one (1) Kalrez O-ring for QF50 flange | LPS02-ORKK |
| Replacement Viton O-ring kit for 75 mm (~ 3") LeakProof Seal | Kit includes two (2) Viton O-rings for 75 mm quartz tube, two (2) PTFE backup rings for 75 mm LeakProof Seals, and one (1) Viton O-ring for QF100 flange | LPS03-ORKV |
| Replacement Perlast O-ring kit for 75 mm (~ 3") LeakProof Seal | Kit includes two (2) Perlast O-rings for 75 mm quartz tube, two (2) PTFE backup rings for 75 mm LeakProof Seals, and one (1) Perlast O-ring for QF100 flange | LPS03-ORKK |
| Accessories | ||
| Name |
Description |
Product Code |
| Hand vacuum pump for actuating LeakProof Seals | Hand pump with hoses | HANDP-4050 |
| Hand tightening tool for 25 mm (~ 1") LeakProof Seals |
Hand tool for tightening the rear nut of the 25 mm LeakProof Seal | LPS01-HTT |
| Hand tightening tool for 50 mm (~ 2") LeakProof Seals |
Hand tool for tightening the rear nut of the 50 mm LeakProof Seal | LPS02-HTT |
| Portable combustible gas leak detector | Handheld detector for combustible gases. Batteries included | PFGD |
Refer to the O-ring compatibility guide to determine the compatibility of your CVD system feedstock materials with the LeakProof Seal O-rings. Order the replacement perfluorinated elastomer O-ring kit if your chemicals are not compatible with Viton.
If you don't see your reaction materials here, please contact us.

