Precursor Delivery

Precursors come in all forms, from gases to liquids to solids. Chemical Vapor Deposition (CVD) processes utilize the full range, so Atomate has developed different precursor delivery options to provide the flexibility and control you need to perform your CVD processes and experiments.

Gas Delivery Modules (GDM)

Possible configuration for standard and advanced gas delivery modules

Gas Delivery Modules (GDM) are used with gas phase precursor materials. The standard configuration of Atomate's GDM includes four or eight Mass Flow Controllers (MFC), but any number of gas lines can be accommodated.

• Gas Delivery Module Standard Features
• Offered either as a self-enclosed, vented unit or as an open panel unit
• Includes gas flow control and process gas shutoff valves
• Independent gas line purging and vent to vacuum can be added
• Typically paired with the gas flow control module, which controls pneumatic valves and mass flow controllers

Bubbler Modules

Heated bubbler with pressure control feature

Bubblers are used to vaporize liquid precursors. Requirements for bubblers are dependent on the properties of the liquids to be vaporized.  Atomate offers three standard bubbler modules for liquids ranging from water to metalorganic precursors.

• Bubbler Module Standard Features
• Standard VCR fittings facilitate integration into all Atomate CVD systems or other OEM equipment
• Includes a stand-alone GUI control panel with serial interface for PC-based control such as Atomate Workbench control software

Solid Source Heaters

In-situ solid source heater

Rapid thermal solid source heater

Solid Source Heaters are used to vaporize or sublimate solid precursors. Atomate has developed customized solid source heating modules for a variety of solids, including Zn and Ga.