Bubbler Modules

Heated bubbler module with touch screen controller

Atomate offers bubbler modules to vaporize liquid precursors for Chemical Vapor Deposition (CVD) systems. Three types of bubbler modules are available for processes ranging from water or ethanol vaporization to metalorganic and TEOS vaporization. The bubblers can be integrated into our own systems, or provided as add-ons to interface with other OEM equipment.

  • All Atomate bubbler modules offer the following standard features
  • Mass flow controller
  • Pneumatic shutoff valves for carrier gas and vent gas flow control
  • Orbitally-welded plumbing
  • Real-time process control through the touch screen controller
  • RS-232 serial interface with Atomate Workbench recipe control software or any PC-based OEM control
View Available Versions.
Heated ampoule with custom insulation
Ordering Information
Bubbler Module Product Code
Basic bubbler module BB-A
Heated bubbler module BB-MH
Chill/ heat bubbler module BB-AT
Contact Atomate for more information about adding a bubbler to your CVD system capabilities.
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