Gas Delivery Modules (GDM)

The GDM is a modular arrangement of Mass Flow Controllers (MFCs) and pneumatic solenoid valves plumbed to provide gas delivery channels for a variety of applications ranging from sampling to gas blending to semiconductor processing. The modular design enables the user to define a custom GDM that can be delivered from standardized sub-elements at lower cost.

Improving Gas Flow Control

Robust gas delivery systems feature complete gas flow shutoff capability, purging capability, and VCR fittings.  Atomate’s expertise has led to several new concepts in gas delivery. The unique modular concept enables users to choose a gas delivery option for their system and to easily make changes later.

Standard and Custom Configurations Available

Gas delivery modules are available in standard enclosed 4-channel and 8-channel versions, or can be customized with any number of gas channels and features for any application. Our modular ‘gas stick’ concept simplifies the process of introducing MFCs for each gas, and plumbing each MFC to the selected manifold for accurate gas delivery. 

• Standard Features
• Mass Flow Controllers (MFCs)
• Orbitally-welded plumbing
• Manual valve or pneumatic solenoid valve on each gas channel input
• Powder-coated steel enclosure for tamper-proofing and primary containment of potential leaks

Quality Construction
Each panel is built using only the highest quality components. All plumbing is constructed with 316/316L stainless steel tubing and fittings, and orbitally welded.  The final assemblies are helium leak checked for integrity and a leak certificate can be provided for all assemblies that leave our factory floor.

Design a GDM for Your Application

STEP 1: SELECT THE APPROPRIATE GAS STICK FOR EACH GAS CHANNEL Each gas stick can be selected for functionality, gas species, or application.
	Mass Flow Controller	Shutoff Valve	Purge Valve	Applications	Typical Gases
Basic Gas Stick	X			Non-hazardous or leak-tolerant	N2, Ar, He
Standard Gas Stick	X	X		Requires positive gas shutoff	CH4, H2, CO, NH3
Advanced Gas Stick	X	X	X	Requires gas line purging	HCl, SiH4, PH3

STEP 2: SELECT THE APPROPRIATE MANIFOLD CONFIGURATION Gases can be individually ported or combined into any of the manifold options below.
Basic Manifold:	Blends gases into a single manifold with one outlet port
Vacuum Manifold:	Adds a bypass port for purging or evacuating through a direct line to vacuum
Advanced Manifold:	Adds customized delivery of selected gases into the reaction chamber through separate lines, showerheads, or diffusers
Customized Manifold:	See other gas distribution methods or contact Atomate with your specific gas delivery plan

• STEP 3: SELECT ANY ADDITIONAL OPTIONS
• Valve position indicators
• Pressure transducers
• Mountable gas sensors
• Manual valves for panel isolation
• Helium leak test certificate
• Additional options are available