Gas Distribution and Custom Fabrications

As substrates increase in size, gas distribution plays a greater role in achieving uniform growth across a substrate.  Atomate engineers analyze our gas delivery systems with flow modeling and optimize them through the use of distribution plates, diffusers, and showerheads.

Distribution Plate/ Diffuser

For large diameter systems (i.e., 100 mm and greater), distribution plates provide an effective means of delivering premixed precursors to the growth region to achieve uniform growth across a substrate. Diffusers are useful for systems ranging from 50 mm to 100 mm in diameter.

Showerhead

For processes in which pre-mixing of precursors may result in unwanted adduct formation, showerheads are used to uniformly deliver unmixed precursors to a chamber over the face of the showerhead.  Atomate has created a patent-pending showerhead design that is most commonly used in MOCVD systems. Single or multi-plenum configurations are available with heating or cooling.

Custom

Atomate can also provide custom gas distribution hardware for your system.