Spare and Replacement Parts
For the convenience of our customers, Atomate stocks a variety of products available for use with your CVD system. These replacement parts are the same products we use in the complete CVD systems that we deliver.
- Quartz Tubes and Other Quartzware
- Replacement components for your Atomate, self-built, or other OEM CVD system
- Viton® and Kalrez®/ Perlast® O-rings
- Replacement O-rings for your LeakProof Seals in case your original O-rings become damaged or worn. Refer to the O-ring compatibility guide for appropriate selection of O-ring material based on the feedstock and precursor materials required for your syntheses.
- VCR Gaskets
- Scrubber Canisters
- Replacement canisters for gas scrubbers. Please provide the model number when ordering.
- Gas Sensor Elements
- Replacement sensor elements for your CVD system. Please provide the model number when ordering.
- Pump Oil (Fomblin)
- Perfluorinated polyether vacuum pump fluid, available in 1 kg and 2 kg quantities
- Braycote Low Vapor Pressure Grease
- Used for lubrication of O-rings in LeakProof Seals and Quick Flange fitting
Contact Atomate for more information.
