Quartzware

Atomate stocks a variety of quartz products, including boats, loader rods, and process tubes appropriate for tube furnaces. These components can be used on any Atomate CVD system or for any other application requiring quartzware.

• Quartz Tubes
• Quartz tubes are stocked in several lengths with fire polished ends to reduce chipping and breakage. Nonstandard lengths and sizes are available.
• Quartz Boats
• Atomate carries a range of standard (multi-wafer) and custom (chip, single wafer, and powder) quartz boats in stock, available for next day delivery. Quartz boats can be sized for custom applications, as well.
• Quartz Loading Rods
• Quartz loading rods are standard features on many enclosed Atomate systems. The rods suspend quartz boats during loading and unloading to prevent contact, eliminating the particle generation associated with drag-loaded boats.

Other replacement quartz parts such as fritted disk diffusers, custom boats, and custom loader parts can be provided.