Quartzware Ordering Information
| Quartz Tubes – GE214 Quartz Tubes with Fire Polished Ends | ||
| Name | Description | Product Code |
| Quartz tube for 25 mm system | 22 mm x 25 mm x 600 mm (ID x OD x length) Compatible with 25 mm (~1") LeakProof Seals |
QZTUB-1x24 |
| Quartz tube for 50 mm system | 46 mm x 50 mm x 1200 mm (ID x OD x length) Compatible with 50 mm (~ 2") LeakProof Seals |
QZTUB-2x48 |
| Quartz tube for 75 mm system | 70 mm x 75mm x 1200 mm (ID x OD x length) Compatible with 75 mm (~ 3") LeakProof Seals |
QZTUB-3x48 |
| Quartz tube for 125 mm system | 120 mm x 125mm x 1500 mm (ID x OD x length) Compatible with 125 mm (~ 5") LeakProof Seals |
QZTUB-5x60 |
| Quartz Loaders | ||
| Name | Description | Product Code |
| Quartz loader support rods | Rods fabricated from GE 214 quartz stock. Single end capped with fire polish. 36" length. Designed for use with Atomate guided loader on 50 mm or 75 mm enclosed LPCVD/ PECVD systems |
QROD-0236 |
| Quartz loader tongue | Fabricated from GE214 and GE124 quartz stock | QLOAD-05T |
| Quartz Boats | ||
| Name | Description | Product Code |
| Quartz boat for 25 mm system |
Dual-purpose (double sided) quartz boat for flat substrates and powder processing. For use with 25 mm (~1") horizontal tube CVD system |
QBOAT -3/4x3 |
| Quartz boat for 50 mm system |
Quartz boat machined from GE 124 quartz ingot. Designed for use with Atomate loaders for 50 mm (~2") CVD systems |
1299 -071905- 1.1-FL |
| Quartz boat for 100 mm wafers |
Designed for use with Atomate loaders for 125 mm (~5") CVD systems |
QBOAT -4V25 |
| Manual Boat Loaders | ||
| Name | Description | Product Code |
| Telescoping hand loader for 25 mm quartz boats | Hand tool for loading quartz boat into 25 mm (~1") benchtop tube reactor system | XHL-1 |
| Telescoping hand loader for 50 mm quartz boats | Hand tool for loading quartz boat into 50 mm (~2") benchtop tube reactor system | XHL-2 |
Contact Atomate for more information.
