Workbench Software Product Data Sheet

Atomate Workbench software simplifies process repeatability, enabling improved control and quicker research results.  Standard controlled parameters include gas selection and flow rate control, furnace temperature control, and pressure control.  Control of additional parameters can be added.  The software user can program time-based recipe steps and run the  desired process entirely using software control.  Manual or time-step modes can be selected to obtain the type of process control best suited to individual processes.

Workbench Features

• Flexibility
• Control parameters can be changed to accommodate hardware changes, system modifications and upgrades
• Many standard components are already included in the database
• Custom changes can be made to accommodate specific needs
• Graphical User Interface (GUI) can be tailored to user preferences
• Recipes programmable using pull-down menus or tabular inputs
• Multiple display modes available
• Real-time process monitoring with graphical display
• Group display
• Data table showing time and process values
• Gauge readings of real time process parameters
• Run log showing progress through each recipe step

• Comprehensive Controls
• Process hardware and variables can be controlled
• Reaction chamber temperatures
• Gas flows
• Chamber pressure
• Pneumatic valve actuation
• Furnace open/ close
• Bubbler temperatures and gas flow conditions
• Solid source evaporator operation
• RF plasma generator operation
• Vent line heaters on/ off
• Unlimited-step recipes
• Automatically recording of process run data
• Generation of .log file with run summary

• Recipe Simulation
• Recipes can be simulated using the software to verify the program prior to actual run
• Simulation mode allows users to modify process parameters without altering system settings

• Remote Recipe Editing Feature
• Recipe editor software can be installed on Windows platforms to create or edit recipes
• Recipes created remotely can be transferred to the CVD system computer for process control

• Embedded Recipes and Sub-programs
• Sub-recipe feature allows user to create more complex processes with repeating elements that can be used in other recipes
• Embedded recipes are supplied for common processes such as "purge"
• Conditional actions are available and easily included in recipes